[A-6-6] Low-Temperature Selective Deposition of Silicon by Time-Modulation Exposure of Disilane and Formation of Silicon Nanowires

Shin Yokoyama, Kenji Ohba, Kensaku Kawamura, Toshiro Kidera, Anri Nakajima (1.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2000.A-6-6