[B-1-6] 70nm NMOSFET Fabrication with 12nm n+-p Junctions Using As2+A Low Energy Ion Implantations

Byung Yong Choi, Suk Kang Sung, Byung Gook Park, Jong Duk Lee (1.Inter-university Semiconductor Research Center, School of Electrical Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.2000.B-1-6