20nm MOS Devices for the Birth of the 21st Century

Simon Deleonibus; Guillaume Bertrand; Georges Guegan; Michel Heitzmann; Pierre Mur; David Souil; Serge Tedesco

doi:https://doi.org/10.7567/SSDM.2000.B-2-1

2000 International Conference on Solid State Devices and Materials

Aug 29, 2000 - Aug 31, 2000
Sendai International Center, Sendai, Japan

[B-2-1] 20nm MOS Devices for the Birth of the 21st Century

Simon Deleonibus, Guillaume Bertrand, Georges Guegan, Michel Heitzmann, Pierre Mur, David Souil, Serge Tedesco (1.LETI (CEA-GRENOBLE) Departement de Microelectronique)

https://doi.org/10.7567/SSDM.2000.B-2-1

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