[B-5-2] Study on Zr-Silicate Interfacial Layer of ZrO2-MIS Structure Fabricated by Pulsed Laser Ablation Deposition Method

Takeshi Yamaguchi, Hideki Satake, Akira Toriumi (1.Advanced LSI Technology Laboratory, Toshiba Corporation)

https://doi.org/10.7567/SSDM.2000.B-5-2