[B-5-3] Charge Trapping in SiOx/ZrO2 Gate Dielectric Stacks

M. Houssa、M. Naili、M. M. Heyns、A. Stesmans (1.Department of Physics, Katholieke Universiteit Leuven、2.IMEC)

https://doi.org/10.7567/SSDM.2000.B-5-3