[B-9-1] A Guideline for Accurate Two-Frequency Capacitance Measurement for Ultra-Thin Gate Oxides

Akiko Nara, Naoki Yasuda, Hideki Satake, Akira Toriumi (1.Advanced LSI Technology Laboratory Research & Development Center, Toshiba Co.)

https://doi.org/10.7567/SSDM.2000.B-9-1