[B-9-3] Non-Destructive and Contactless Monitoring Technique of Si Surface Stress by Photoreflectance

Masayuki Sougawa, Takeshi Kanashima, Masashi Agata, Kaoru Yamashita, Masanori Okuyama, Akira Fujimoto, Koji Eriguchi (1.Division of Advanced Electronics and Optical Science, Graduate School of Engineering Science, Osaka University, 2.Dept. Electrical Engineering, Wakayama National College of Technology, 3.ULSI Process Tech. Dev. Ctr., Matsushita Electronics)

https://doi.org/10.7567/SSDM.2000.B-9-3