[C-4-6] Electrical Characteristics of Pt/SrBi2Ta2O9/Ta2O5/Si Using Ta2O5 as the Buffer Layer

Hoon Sang Choi, Kun Sang Park, Yong Tae Kim, In-Hoon Choi (1.Department of Materials Science and Engineering, Korea University, 2.Semiconductor Device Lab., Korea Institute of Science and Technology)

https://doi.org/10.7567/SSDM.2000.C-4-6