[C-5-3] Electrical Characterization of a Triple Self-Aligned Split-Gate Flash Cell for 0.18 μm Embedded Application

Jiang Yan, Christian Gruensfelder, Andreas Schmidt, Kisang Kim, Rebecca Mih, Jay Harrington, Kevin Houlihan, Hyun Koo Lee, Kevin Chan, Jeffrey Johnson, Bomy Chen, Connie Lo, Dana Lee, Amitay Levi, Chung Lam, Danny Shum (1.Infineon Technologies Corp., 2.IBM, Microelectronic Division, 3.IBM, T. J. Watson Research Center, 4.IBM, Microelectronics Division, 5.Silicon Storage Technology, Inc.)

https://doi.org/10.7567/SSDM.2000.C-5-3