[C-9-3] Substrate Characteristics of Nanocleave SOI Wafers

I. J. Malik、S. W. Bedell、H. Kirk、M. Korolik、S. Kang、M. I. Current、F. J. Henley (1.Silicon Genesis Corporation)

https://doi.org/10.7567/SSDM.2000.C-9-3