[C-9-3] Substrate Characteristics of Nanocleave SOI Wafers

I. J. Malik, S. W. Bedell, H. Kirk, M. Korolik, S. Kang, M. I. Current, F. J. Henley (1.Silicon Genesis Corporation)

https://doi.org/10.7567/SSDM.2000.C-9-3