[D-2-6] Novel Si Quantum Memory Structure with Self-Aligned Stacked Nanocrystalline Dots

Ryuji Ohba, Naoharu Sugiyama, Junji Koga, Ken Uchida, Akira Toriumi (1.Advanced LSI Technology Laboratory, TOSHIBA Corporation)

https://doi.org/10.7567/SSDM.2000.D-2-6