[LB-1-1] Plasma Charging Damage Immunity in SOI Devices

Mukesh Khare, A. Mocuta, E. Leobandung, T. Chou, B. Linder, W. Rausch, P. Agnello, F. Assaderaghi, L. T. Su, G. Shahidi, T.-C. Chen (1.IBM Semiconductor Research and Development Center (SRDC), 2.IBM Research Division, T. J. Watson Research Center)

https://doi.org/10.7567/SSDM.2000.LB-1-1