[LB-1-1] Plasma Charging Damage Immunity in SOI Devices

Mukesh Khare、A. Mocuta、E. Leobandung、T. Chou、B. Linder、W. Rausch、P. Agnello、F. Assaderaghi、L. T. Su、G. Shahidi、T.-C. Chen (1.IBM Semiconductor Research and Development Center (SRDC)、2.IBM Research Division, T. J. Watson Research Center)

https://doi.org/10.7567/SSDM.2000.LB-1-1