[LC-1-3] Fabrication and Characterization of Pt/(Bi, La)4Ti3O12/Si3N4/Si MFIS Structure for FET-Type Ferroelectric Memory Applications

Takeshi Kijima、Yoshihisa Fujisaki、Hiroshi Ishiwara (1.Frontier Collaborative Research Center, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.2000.LC-1-3