[LE-2-2] Performance of Submicron Large-Grain Polysilicon-on-Insulator (LPSOI) MOSFETs Formed by Crystallization of Amorphous Silicon

Mansun Chan、Hongmei Wang、Singh Jagar (1.Department of Electrical and Electronic Engineering, Hong Kong University of Sci. & Tech.)

https://doi.org/10.7567/SSDM.2000.LE-2-2