[LE-2-3] Investigation on Reliability of High Quality Ultra-Thin ISSG Oxides

T. Y. Luo, G. A. Brown, A. L. P. Rotondaro (1.University of Texas at Austin, 2.International Sematech, Inc., 3.Texas Instruments Inc)

https://doi.org/10.7567/SSDM.2000.LE-2-3