[A-1-2] Periodic Mesoporous Silicate Glass as Low-k Thin Film

Yoshiaki Oku, Akira Kamisawa, Norikazu Nishiyama, Korekazu Ueyama (1.Process Technology Div., Semiconductor Research and Development Headquarters, ROHM CO., Ltd., 2.Osaka University, Graduate School of Engineering Science)

https://doi.org/10.7567/SSDM.2001.A-1-2