[A-2-4] Impact of Gate Etch Damage and Profile in High Density DRAM Cell

Il-Gweon Kim, Jung-wan Bae, Jun-Ho Choy, Nam-Sung Kim, Young-Woo Kweon, Se-Kyoung Choi, Sung-Chul Kim, Joo-Seog Park, Ji-Byum Kim (1.TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.)

https://doi.org/10.7567/SSDM.2001.A-2-4