[A-2-8] Filling of Tungsten into Deep Trench Using Time-Modulation CVD Method

Y. Igarashi, T. Morooka, Y. Yamada, T. Nakamura, K. W. Lee, K. T. Park, H. Kurino, M. Koyanagi (1.Dept. of Machine Intelligence and Systems Engineering, Tohoku Univ., 2.JST(Japan Science and Technology Corporation))

https://doi.org/10.7567/SSDM.2001.A-2-8