[A-2-8] Filling of Tungsten into Deep Trench Using Time-Modulation CVD Method

Y. Igarashi、T. Morooka、Y. Yamada、T. Nakamura、K. W. Lee、K. T. Park、H. Kurino、M. Koyanagi (1.Dept. of Machine Intelligence and Systems Engineering, Tohoku Univ.、2.JST(Japan Science and Technology Corporation))

https://doi.org/10.7567/SSDM.2001.A-2-8