Repeated Spike Technology Employed in Rapid Thermal Processing

Chao-Chi Hong; Chang-Yun Chang; Chih-Hao Chen; Jenn-Gwo Hwu

doi:https://doi.org/10.7567/SSDM.2001.A-4-2

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜 2001年9月28日
Diamond Hotel, Tokyo, Japan

[A-4-2] Repeated Spike Technology Employed in Rapid Thermal Processing

Chao-Chi Hong、Chang-Yun Chang、Chih-Hao Chen、Jenn-Gwo Hwu (1.Rm446, Department of Electrical Engineering and Graduate Institute of Electronics Engineering National Taiwan University)

https://doi.org/10.7567/SSDM.2001.A-4-2

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