The Japan Society of Applied Physics

[A-4-2] Repeated Spike Technology Employed in Rapid Thermal Processing

Chao-Chi Hong, Chang-Yun Chang, Chih-Hao Chen, Jenn-Gwo Hwu (1.Rm446, Department of Electrical Engineering and Graduate Institute of Electronics Engineering National Taiwan University)

https://doi.org/10.7567/SSDM.2001.A-4-2