[A-6-4] Advanced Retrograde Well Technology for 90-nm-node Embedded SRAM by High-Energy Parallel Beam

T. Yamashita, M. Kitazawa, Y. Kawasaki, H. Takashino, T. Kuroi, Y. Inoue, M. Inuishi (1.ULSI Development Center, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.2001.A-6-4