[B-1-2] Three-Dimensional Integration of Fully Depleted SOI Devices

T. Morooka, T. Nakamura, Y. Yamada, Y. Igarashi, K. W. Lee, K. T. Park, H. Kurino, M. Koyanagi (1.Dept. of Machine Intelligence and Systems Engineering, Tohoku University, 2.JST(Japan Science and Technology Corporation))

https://doi.org/10.7567/SSDM.2001.B-1-2