[B-1-5] New Plasma Surface Treatment for Wire Bonding Process -Effect of Sublimation with Alkyl Group Radicals-

Kazuhiro Honsho, Hirokazu Terai, Hiroshi Yamazoe, Toshiaki Tatsuta, Osamu Tsuji (1.Samco International Inc.)

https://doi.org/10.7567/SSDM.2001.B-1-5