[B-1-5] New Plasma Surface Treatment for Wire Bonding Process -Effect of Sublimation with Alkyl Group Radicals-
Kazuhiro Honsho、Hirokazu Terai、Hiroshi Yamazoe、Toshiaki Tatsuta、Osamu Tsuji
(1.Samco International Inc.)
https://doi.org/10.7567/SSDM.2001.B-1-5