[B-3-3] A Decoupled Capacitance Measurement Technique for Characterization of Small-Geometry MOSFETs with Ultra-Thin Gate Oxides

Chuan-Hsi Liu, Ming T. Lee, Yao-Chin Cheng, Jenkon Chen (1.United Microelectronics Corp.)

https://doi.org/10.7567/SSDM.2001.B-3-3