[B-3-3] A Decoupled Capacitance Measurement Technique for Characterization of Small-Geometry MOSFETs with Ultra-Thin Gate Oxides
Chuan-Hsi Liu、Ming T. Lee、Yao-Chin Cheng、Jenkon Chen
(1.United Microelectronics Corp.)
https://doi.org/10.7567/SSDM.2001.B-3-3