The Japan Society of Applied Physics

[B-3-4] Extraction of Interface State Density in Ultra-Thin Gate Dielectrics: A Composition Method of Ideal CV Curves in High-Frequency CV Analysis

Naoki Yasuda, Hideki Satake (1.Advanced LSI Technology Laboratory, Toshiba Corporation)

https://doi.org/10.7567/SSDM.2001.B-3-4