The Japan Society of Applied Physics

[B-9-2] Structural and Electrical Characteristics of HfO2 Films Fabricated by Pulsed Laser Deposition

Hiroya Ikeda, Satoru Goto, Kazutaka Honda, Mitsuo Sakashita, Akira Sakai, Shigeaki Zaima, Yukio Yasuda (1.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, 2.Center for Cooperative Research in Advanced Science and Technology, Nagoya University)

https://doi.org/10.7567/SSDM.2001.B-9-2