[C-10-1] A New Two-Step Round Oxidation STI Technology for Highly Reliable Flash Memory
Naoki Ueda, Yoshimitsu Yamauchi, Tadahiro Ohmi
(1.Process Development Laboratory, Sharp Corporation, 2.New Industry Creation Hatchery Center, Tohoku University)
https://doi.org/10.7567/SSDM.2001.C-10-1