[C-4-4] A Simple Method to Fabricate Double-Gate SOI MOSFET with Diffusion Layer on Bulk Silicon Wafer as the Bottom Gate
Xinnan Lin、Chuguang Feng、Shengdong Zhang、Wai-Hung Ho、Mansun Chan
(1.Department of Electrical and Electronic Engineering, Microelectronics Fabrication Facility Hong Kong University of Science & Technology)
https://doi.org/10.7567/SSDM.2001.C-4-4