[C-8-2] Novel Capacitor Technology for Sub-Quarter Micron 1T1C FRAM

Y. J. Song, N. W. Jang, D. J. Jung, H. H. Kim, H. J. Joo, S. Y. Lee, K. M. Lee, S. H. Joo, S. O. Park, Kinam Kim (1.Technology Development Team, R&D Center, Memory Devices, Samsung Electronics Co. Ltd.)

https://doi.org/10.7567/SSDM.2001.C-8-2