[D-3-4] A New Photodiode Structure with Spacer Window for High Sensitivity 0.35-μm CMOS Imagers

Hsiu-Yu Cheng, Hsien-Chun Chang, Shing-Rung Li, Liang-Wei Lai, Shuh-Sen Lin, Ya-Chin King (1.Microelectronic Laboratory, Semiconductor Technology Application Research (STAR) Group, Department of Electrical Engineering, National Tsing-Hua University)

https://doi.org/10.7567/SSDM.2001.D-3-4