The Japan Society of Applied Physics

[E-6-4] Investigation of the Polarization-Induced Charges in Modulation-Doped Alx- Ga1-xN/GaN Heterostructures through Capacitance-Voltage Profiling and Simulation

Y. G. Zhou, B. Shen, H. Q. Yu, R. Zhang, Y. D. Zheng, T. Someya, Y. Arakawa (1.National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, 2.Research Center for Advanced Science and Technology and Institute of Industrial Science, University of Tokyo)