[F-1-3] Monitoring Degradation of Source/Drain Extension in Sub-Quarter-Micron MOSFET's

G. Chen、M. F. Li、X. M. Li、X. Yu (1.SNDL and CICFAR, Department of Electrical & Computer Engineering, National University of Singapore、2.Chartered Semiconductor Manufacturing Ltd.)

https://doi.org/10.7567/SSDM.2001.F-1-3