The Japan Society of Applied Physics

[F-5-3] High-Accuracy Analysis of Interconnect Capacitance for Floating Metal Fills

Takashi Tameshige, Yoshiaki Takemura, Ken Yamaguchi Nobuhiro Konishi, Shinichi Fukada, Takuya Maruizumi (1.Advanced Research Laboratory, Hitachi Ltd., 2.Device Development Center, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.2001.F-5-3