[P-1-12] Novel Methods to Incorporate Deuterium in the MOS Structures and Isotope Effects on Soft Breakdown and Interface States

C.-H. Lin, M. H. Lee, B.-C. Hsu, C. W. Liu (1.Dept. of Electrical Engineering, National Taiwan University)

https://doi.org/10.7567/SSDM.2001.P-1-12