Optimization of Low Power Shallow Trench Isolation BiCMOS Technology for Mixed Anlog/Digital Application Systems

H. Nakajima; H. Kawai; C. Yoshino; H. Miyakawa; H. Sugaya; H. Takimoto; H. Nii; K. Inoh; Y. Katsumata; H. Ishiuchi

doi:https://doi.org/10.7567/SSDM.2001.P-1-14

[P-1-14] Optimization of Low Power Shallow Trench Isolation BiCMOS Technology for Mixed Anlog/Digital Application Systems

H. Nakajima, H. Kawai, C. Yoshino, H. Miyakawa, H. Sugaya, H. Takimoto, H. Nii, K. Inoh, Y. Katsumata, H. Ishiuchi (1.System LSI Research & Development Center, Semiconductor Company, Toshiba Corp., 2.Semiconductor Company, Toshiba Corp.)

https://doi.org/10.7567/SSDM.2001.P-1-14

2001 International Conference on Solid State Devices and Materials

[P-1-14] Optimization of Low Power Shallow Trench Isolation BiCMOS Technology for Mixed Anlog/Digital Application Systems