[P-1-14] Optimization of Low Power Shallow Trench Isolation BiCMOS Technology for Mixed Anlog/Digital Application Systems
H. Nakajima、H. Kawai、C. Yoshino、H. Miyakawa、H. Sugaya、H. Takimoto、H. Nii、K. Inoh、Y. Katsumata、H. Ishiuchi
(1.System LSI Research & Development Center, Semiconductor Company, Toshiba Corp.、2.Semiconductor Company, Toshiba Corp.)
https://doi.org/10.7567/SSDM.2001.P-1-14