The Japan Society of Applied Physics

[P-1-17] Single Electron Memory with a Defined Poly-Si Dot Based on Conventional VLSI Technology

Suk-Kang Sung, Jae-Sung Sim, Dae Hwan Kim, Jong Duk Lee, Byung-Gook Park (1.Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.2001.P-1-17