[A-1-3] Novel Strained-Si Substrate Technology for Transistor Performance Enhancement

Chun-Chieh Lin, Chao-Hsiung Wang, Chung-Hu Ge, Chien-Chao Huang, Tien-Chih Chang, Liang-Gi Yao, Shih-Chang Chen, Mong-Song Liang, Fu-Liang Yang, Yee-Chia Yeo, Chenming Hu (1.Taiwan Semiconductor Manufacturing Company, Ltd.)

https://doi.org/10.7567/SSDM.2002.A-1-3