[A-1-3] Novel Strained-Si Substrate Technology for Transistor Performance Enhancement

Chun-Chieh Lin、Chao-Hsiung Wang、Chung-Hu Ge、Chien-Chao Huang、Tien-Chih Chang、Liang-Gi Yao、Shih-Chang Chen、Mong-Song Liang、Fu-Liang Yang、Yee-Chia Yeo、Chenming Hu (1.Taiwan Semiconductor Manufacturing Company, Ltd.)

https://doi.org/10.7567/SSDM.2002.A-1-3