Ultra-thin Silicon Channel Single- and Double-gate MOSFETs

Meikei Ieong; Jakub Kedzierski; Zhibin Ren; Bruce Doris; Thomas Kanarsky; H-S Philip Wong

doi:https://doi.org/10.7567/SSDM.2002.A-3-1

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜 2002年9月19日
Nagoya Congress Center, Nagoya, Japan

[A-3-1] Ultra-thin Silicon Channel Single- and Double-gate MOSFETs

Meikei Ieong、Jakub Kedzierski、Zhibin Ren、Bruce Doris、Thomas Kanarsky、H-S Philip Wong (1.IBM Semiconductor Research and Development Center (SRDC), Microelectronic Division、2.IBM SRDC, T.J Watson Research Center)

https://doi.org/10.7567/SSDM.2002.A-3-1

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