The Japan Society of Applied Physics

[A-3-1] Ultra-thin Silicon Channel Single- and Double-gate MOSFETs

Meikei Ieong, Jakub Kedzierski, Zhibin Ren, Bruce Doris, Thomas Kanarsky, H-S Philip Wong (1.IBM Semiconductor Research and Development Center (SRDC), Microelectronic Division, 2.IBM SRDC, T.J Watson Research Center)

https://doi.org/10.7567/SSDM.2002.A-3-1