The Japan Society of Applied Physics

[A-6-3] Hot Carrier Enhanced Read Disturb and Scaling Effects in a Localized Trapping Storage SONOS Type Flash Memory Cell

W. J. Tsai, C. C. Yeh, N. K. Zous, C. C. Liu, S. K. Cho, C. H. Chen, Tahui Wang, Sam Pan, Chih-Yuan Lu (1.Macronix International Co., Ltd., 2.Department of Electronics Engineering, National Chiao-Tung University)