[B-2-2] Structure control of periodic porous silica film for low-k application

Kazuhiro Yamada, Yoshiaki Oku, Nobuhiro Hata, Shozo Takada, Takamaro Kikkawa (1.MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 2.MIRAI Project, Advanced Semiconductor Research center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 3.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2002.B-2-2