[B-2-5] Influence of Surface Oxide of Sputtered TaN Film on Displacement Plating of Cu

Zenglin Wang、Hiroyuki Sakaue、Shoso Shingubara、Talayuki Takahagi (1.Graduate School of Advanced Science of Matter, Hiroshima University)

https://doi.org/10.7567/SSDM.2002.B-2-5