[B-2-5] Influence of Surface Oxide of Sputtered TaN Film on Displacement Plating of Cu

Zenglin Wang, Hiroyuki Sakaue, Shoso Shingubara, Talayuki Takahagi (1.Graduate School of Advanced Science of Matter, Hiroshima University)

https://doi.org/10.7567/SSDM.2002.B-2-5